| 标题 |
Molybdenum etching using an SF6, BCl3 and Ar based recipe for high aspect ratio MEMS device fabrication |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of Micromechanics and Microengineering 作者:J Sharma; S N Fernando; W Deng; N Singh; W M Tan 出版日期:2013-06-12 |
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(2025-6-4)