| 标题 |
Material removal rate prediction and surface quality study for ultrasonic vibration polishing of monocrystalline silicon |
| 网址 | |
| DOI | |
| 其它 |
期刊:The International Journal of Advanced Manufacturing Technology 作者:Sheng Qu; Tao Yu; Fanwei Meng; Chao Zhang; Xuewei Zhang; et al 出版日期:2023-07-01 |
| 求助人 | |
| 下载 |
PDF的下载单位、IP信息已删除
(2025-6-4)