| 标题 |
Investigation of dual-frequency effect on the ion energy and flux in Torr-regime plasma by a two-dimensional GPU-PIC simulation |
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| DOI | |
| 其它 |
期刊:Plasma Sources Science and Technology 作者:Chang Ho Kim; Jin Seok Kim; Min Hur; Yukinori Sakiyama; Hae June Lee 出版日期:2021-06-10 |
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(2025-6-4)