| 标题 |
Cooperative control of high aspect ratio anisotropic dry etching and composition for Bi2Te2.7Se0.3 thermoelectric film |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of Alloys and Compounds 作者:Erbiao Min; Yixuan Shi; Shuai Zhou; Jianghe Feng; Juan Li; et al 出版日期:2026-01-26 |
| 求助人 | |
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(2025-6-4)