| 标题 |
专利、报告等 Sputter deposited Mo thin films: multimodal characterization of residual stress, resistivity, crystallinity, and surface morphology |
| 网址 | |
| DOI |
10.18126/io99-ldj2
doi
|
| 其它 |
期刊:Materials Data Facility 作者:David P. Adams; Sadhvikas J. Addamane; Joyce O. Custer; Frank W. Delrio; Luis J. Jauregui; et al 出版日期:2022-01-01 |
| 求助人 | |
| 下载 |
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(2025-6-4)