| 标题 |
Microlithography by using neutral metastable atoms and self-assembled monolayers |
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| DOI | |
| 其它 |
期刊:Science 作者:Berggren KK, Bard A, Wilbur JL, Gillaspy JD, Helg AG, McClelland JJ, Rolston SL, Phillips WD, Prentiss M, Whitesides GM 出版日期:1995-09-01 |
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(2025-6-4)