| 标题 |
Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope |
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| DOI | |
| 其它 |
期刊:Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology 作者:Wangpiao Lin; Jun Shimizu; Libo ZHOU; Teppei Onuki; Hirotaka Ojima 出版日期:2021-08-23 |
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(2025-6-4)