| 标题 |
Enhanced control of cathode arcing during sputter deposition of insulating films |
| 网址 | |
| DOI | |
| 其它 |
期刊:Surface & Coatings Technology 作者:Gayatri Rane; Philipp Dürrenfeld; U. Krause; Denis M. Shaw 出版日期:2025-06-17 |
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(2025-6-4)