| 标题 |
[高分]
 Tungsten Carbide Hard Mask Performance in Supervia and High Aspect Ratio Patterning for BEOL Advanced Interconnects |
| 网址 | |
| DOI |
10.7567/ssdm.2024.c-1-04
doi
|
| 其它 |
期刊：Extended Abstracts of the 2024 International Conference on Solid State Devices and Materials 作者：Daniel Montero; Philippe Marien; Yannick Hermans; Fulya Ulu Okudur; Mattia Pasquali; et al 出版日期：2024-10-16 |
| 求助人 | |
| 下载 |
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(2025-6-4)
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