| 标题 |
Hybrid simulation of instabilities in capacitively coupled RF CF 4 /Ar plasmas |
| 网址 | |
| DOI | |
| 其它 |
期刊:Plasma Sources Science and Technology 作者:Wan Dong; Yi-Fan Zhang; Zhong-Ling Dai; Julian Schulze; Yuan-Hong Song; et al 出版日期:2022-01-05 |
| 求助人 | |
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(2025-6-4)