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428 积分 2022-07-14 加入
Experimental and Theoretical Exploration of Oxygen Impurities in Sputter Grown β-Ta Films
3天前
已完结
Growth and stability of β -Ta films for spintronic applications: a review
5天前
已完结
Surface chemical reactions of etch stop prevention in plasma-enhanced atomic layer etching of silicon nitride
6天前
已完结
Effect of sputter pressure on Ta thin films: Beta phase formation, texture, and stresses
6天前
已完结
Molecular dynamics simulations of silicon nitride atomic layer etching with Ar, Kr, and Xe ion irradiations
8天前
已完结
Molecular dynamics simulations of the sputtering of SiC and Si3N4
8天前
已完结
Nitride film deposition by reactive ion beam sputtering
8天前
已完结
Influence of different etching mechanisms on the angular dependence of silicon nitride etching
8天前
已完结
Preferential sputtering of Si3N4
8天前
已完结
Atomic scale simulation of physical sputtering of silicon oxide and silicon nitride thin films
8天前
已完结
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