| 标题 |
Detection of defective chips from nanostructures with a high-aspect ratio using hyperspectral imaging and deep learning |
| 网址 | |
| DOI |
10.1117/1.JMM.23.4.044002
doi
|
| 其它 |
期刊:Journal of micro/nanopatterning, materials, and metrology 作者:Sunhong Jun; Wonjun Choi; Yong-Ju Jeon; Jeongsu Ha; Kyuhwan Kim; et al 出版日期:2024-10-10 |
| 求助人 | |
| 下载 |
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(2025-6-4)