| 标题 |
In situ mass spectrometric study of trimethylgallium decomposition and subsequent hydrocarbon combustion during the metalorganic vapor phase epitaxy of β -Ga 2 O 3 |
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| DOI | |
| 其它 |
期刊:Japanese Journal of Applied Physics 作者:Yuma Terauchi; Shogo Sasaki; Junya Yoshinaga; Yoshihiko Takinami; Masato Ishikawa; et al 出版日期:2025-12-01 |
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(2025-6-4)