| 标题 |
[高分]
Lift-off Patterning of 1 µm Line Width using Single Layer Photoresist |
| 网址 | |
| DOI |
10.1541/ieejsmas.143.204
doi
|
| 其它 |
期刊:IEEJ Transactions on Sensors and Micromachines 作者:Hiromitsu Sasaki; Masaaki Moriyama; Kentaro Totsu 出版日期:2023-07-01 |
| 求助人 | |
| 下载 |
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(2025-6-4)