| 标题 |
Towards Unparallelled CMOS-compatible Air-coupled pMUT Performance with 30% Sc-doped AlN through an Analysis of Residual Stress Effects |
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期刊:2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) 作者:Jihang Liu; Goh Duan Jian; Daniel Ssu-Han Chen; David Choong Sze Wai; Trivedi Shyam; et al 出版日期:2024-09-22 |
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(2025-6-4)