| 标题 |
On the origin and evolution of hotspots in multipatterning processes |
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| DOI | |
| 其它 |
期刊:Journal of vacuum science and technology 作者:Prem Panneerchelvam; Chad M. Huard; Trey Graves; Alessandro Vaglio Pret; Roel Gronheid; et al 出版日期:2023-06-06 |
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(2025-6-4)