| 标题 |
Surface Corrosion Inhibition Effect and Action Mechanism Analysis of 5-Methyl-Benzotriazole on Cobalt-Based Copper Film Chemical Mechanical Polishing for GLSI |
| 网址 | |
| DOI | |
| 其它 |
期刊:ECS Journal of Solid State Science and Technology 作者:Han Yan; Xinhuan Niu; Fu Luo; Minghui Qu; Ni Zhan; et al 出版日期:2023 |
| 求助人 | |
| 下载 | 该求助完结已超 24 小时,文件已从服务器自动删除,无法下载。 |
PDF的下载单位、IP信息已删除
(2025-6-4)