| 标题 |
Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design |
| 网址 | |
| DOI | |
| 其它 |
期刊:Inorganic Chemistry 作者:Sydney C. Buttera; Polla Rouf; Petro Deminskyi; Nathan J. O’Brien; Henrik Pedersen; et al 出版日期:2021-07-12 |
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(2025-6-4)