| 标题 |
Effect of polishing pad hardness on scratch removal efficiency of fused silica in chemical mechanical polishing |
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| DOI | |
| 其它 |
期刊:Journal of Materials Research and Technology 作者:Yongjie Li; Long-Xiang Li; Hong-Da Wei; Xing-Chang Li; Xuejun Zhang 出版日期:2026-01-01 |
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(2025-6-4)