| 标题 |
Finite element simulation and experimental investigation of in-situ laser-assisted diamond turning of monocrystalline silicon |
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| DOI | |
| 其它 |
期刊:Semiconductor Science and Technology 作者:Wangjie Hu; Xuesen Zhao; Tao Sun; Junjie Zhang 出版日期:2024-04-30 |
| 求助人 | |
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(2025-6-4)