| 标题 |
Impact of Precursor Temperature and Carrier Gas Flow Rates on Low-Temperature Atomic Layer Deposition of SiO 2 Using BDEAS |
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| DOI | |
| 其它 |
期刊:2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 作者:Bridgette Rodman; Cassidy Borden; Bas Korevaar 出版日期:2026-05-11 |
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(2025-6-4)