| 标题 |
The surface removal mechanism of laser structured SiC surface under self-rotating grinding process |
| 网址 | |
| DOI | |
| 其它 |
期刊:Materials Science in Semiconductor Processing 作者:Pei Chen; Jie Zhou; Jingbo Liu; Rui Pan; Fei Qin 出版日期:2026-09-01 |
| 求助人 | |
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(2025-6-4)