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Microstructure and mechanical properties of IBAD niobium films on sapphire substrates 蓝宝石衬底上IBAD铌薄膜的微观结构和力学性能
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期刊:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 作者:Hong Ji; Gary S. Was; J. Wayne Jones; Neville R. Moody 出版日期:2002-07-26 |
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