| 标题 |
Atomistic study on improvement of mechanical properties of aluminum nitride by laser-coupled ultrasonic grinding |
| 网址 | |
| DOI | |
| 其它 |
期刊:Materials Science in Semiconductor Processing 作者:He Zhang; Cong Sun; Jun Zhang; Shuwen Lin; Chenhuan Xu; et al 出版日期:2026-05-27 |
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(2025-6-4)