| 标题 |
 Effect of cooling system design on the heat dissipation of the magnetron sensitive components with rectangular target during sputtering by Ar |
| 网址 | |
| DOI | |
| 其它 |
期刊：Results in Engineering 作者：Ali Ayachi Omar; Nail Faikovich Kashapov; Alexander Grigoryvich Luchkin; Asma Ayachi Amor; Abdelouahed Ayachi Amar 出版日期：2022 |
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(2025-6-4)
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