| 标题 |
 Optimization of the Showerhead for Atomic Layer Deposition by Computational Fluid Dynamics |
| 网址 | |
| DOI | |
| 其它 |
期刊：International Journal of Precision Engineering and Manufacturing-Green Technology 作者：Seung Heon Lee; Do Yeong Jung; Dong Kun Song; Hyeon Do Han; Gyeong Won Min; et al 出版日期：2026 |
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(2025-6-4)
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