Robust Control of Multi-Line Re-Entrant Manufacturing Plants via Stochastic Continuum Models

稳健性(进化) 维数之咒 半导体器件制造 计算机科学 控制工程 生产线 数学优化 工厂(面向对象编程) 非线性系统 生产控制 控制理论(社会学) 工程类 控制(管理) 生产(经济) 人工智能 数学 薄脆饼 机械工程 生物化学 宏观经济学 量子力学 物理 经济 化学 程序设计语言 电气工程 基因
作者
Chunyang Zhang,Qing Gao,Michael Basin,Jinhu Lü,Hao Liu
出处
期刊:IEEE Transactions on Automation Science and Engineering [Institute of Electrical and Electronics Engineers]
卷期号:21 (4): 4923-4935 被引量:18
标识
DOI:10.1109/tase.2023.3305308
摘要

This paper investigates the robust intelligent control problem of multi-line re-entrant manufacturing plants. The control system is designed with a hierarchical architecture, where a nonlinear stochastic hyperbolic partial differential equation (PDE) is used to describe the system dynamics and a robust controller is designed to exponentially drive the manufacturing plants to a desired operation mode with steady feeding and production rates. The developed robust control scheme is shown to be practically implementable through convex optimization techniques. Numerical experiments are presented to demonstrate the feasibility and advantages of the proposed approach. Note to Practitioners —The motivation of this work originates from the need to develop an intelligent robust control strategy for a class of practical complex re-entrant manufacturing plants, for instance, the semiconductor wafer factory and the chemical production lines with numerous process procedures. Discrete-model-based algorithms have been extensively employed in this field due to their excellent convenience and great accuracy. However, when dealing with coupled multi-line re-entrant manufacturing plants with nonlinearities, traditional discrete-model-based methods lack rigorous theoretical analysis and, more importantly, suffer from the curse of dimensionality in many cases. To equip the re-entrant manufacturing plant with a desired operation mode that enjoys significant robustness against stochastic noises, we propose a continuum-model-based intelligent robust control strategy. The proposed method is practically useful in the sense that it can be conveniently applied to various industrial scenarios with re-entrant characteristics and the control design problem can be well solved via available convex optimization algorithms.
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