光子学
硅光子学
计算机科学
硅
光电子学
材料科学
作者
Shi‐Jay Yeh,Cheng‐Ting Shih,F. Yuan,Chih-Ming Hung,C. H. Chu,Hongyan Lu,Jinghai Yang,Wai‐Sum Lo,C.H. Chen,Su-Yueh Tsai,W.C. Tai,S. C. Liu,S.D. Wang,Kai-Shin Wen,W.C. Wang,C.C. Tung,Bencai Lin,Fangrong Hu,P.C. Yeh,Chun Huang
出处
期刊：
日期：2024-12-07
卷期号：: 1-4
被引量：10
标识
DOI：10.1109/iedm50854.2024.10873369
摘要
TSMC has developed an advanced silicon photonics foundry platform tailored to meet the increasing demands of next-generation data communication applications. This paper presents an overview of the platform and the performance of key photonic devices.
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