Calibration of scanning probe microscopes: static and dynamic measures

Modern scanning probe microscopes using piezoceramic stage for scanning are becoming increasingly important metrological equipment. However, this piezoceramic stage has their shortcomings such as creep, non-linearity and hysteresis. To eliminate movement errors it is necessary to additionally calibrate the microscope using various measures. Goals: Develop the method to ensure the accuracy of calibration of a scanning probe microscope, taking into account the piezoceramics non-linearity, creep and hysteresis, using static and dynamic measures: calibration lattices and the nanometre standard. The analysis of piezoceramic stages during scanning was carried out. Considered two measures different principle of operation – static and dynamic. Calibration methods for each measure are given. The possibilities for the application of measures are demonstrated using FemtoScan multifunctional scanning probe microscope. Proposed calibration measures and methods help to improve the metrological standard of scanning probe microscopes in a wide range of movements, what allows for more accurate measurements and images of nanometre-scale objects.