微测辐射热计
多光谱图像
光学
超材料
红外线的
基点
波长
材料科学
焦平面阵列
热辐射计
遥感
探测器
物理
地质学
作者
Alexander Litke,Elahe Zakizade,Sascha Weyers,Anna Lena Schall-Giesecke
出处
期刊:Optics Letters
[Optica Publishing Group]
日期:2025-08-25
卷期号:50 (18): 5767-5767
被引量:1
摘要
This work presents the first multispectral imager consisting of microbolometer focal plane arrays with plasmonic metamaterial absorbers and integrated readout circuitry for imaging in the mid-wavelength and long-wavelength infrared. The fabrication is carried out in a post-CMOS manufacturing process on 200 mm wafers. Existing microbolometer technology featuring a pixel pitch of 17 µm was used as a platform, resulting in metamaterial-integrated microbolometers that are four times smaller than the smallest reported to date. The most responsive detectors produced have a noise-equivalent temperature difference of 151 ± 5 mK, enabling recordings at a frame rate of 30 Hz. Multispectral thermography images are provided as an application example and demonstrate successful implementation.
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