Fully Integrated Solid-State LiDAR Transmitter on a Multi-Layer Silicon-Nitride-on-Silicon Photonic Platform

We report a LiDAR transmitter incorporating both a hybrid-integrated tunable external cavity laser and a high-resolution 2-D optical phased array beam-steerer. Widely tunable single-mode lasing over a span of approximately 100 nm is achieved with >42 dB side-mode-suppression-ratio, 18 mW output power, and 2.8 kHz linewidth. Two-dimensional beam steering in a field-of-view of 140° × 16° exhibits a beam divergence of 0.051° × 0.016° measured in full width at half maximum. Leveraging the low propagation loss, negligible nonlinear loss, and low thermal sensitivity of silicon nitride, and combining the high mode confinement and efficient thermal tuning of silicon, the device affirms the feasibility of high-power on-chip lasing, power bottleneck elimination, and low on-chip insertion loss. It represents the first demonstration of a fully integrated LiDAR transmitter on the multi-layer silicon-nitride-on-silicon photonic platform, revealing the potential of complementary integration in the effort toward a LiDAR transmitter of sufficient optical power budget.