吩恶嗪
薄膜
化学
相(物质)
光化学
材料科学
纳米技术
有机化学
医学
药理学
吩噻嗪
作者
Olga Evgenyevna Ignasheva,Y. Gudimenko,V. E. Agabekov,A. A. Ivko
标识
DOI:10.1016/0040-6090(94)90664-5
摘要
The physicochemical properties of 3-methacryloyloxy-9-diethylamino-5-dicyanomethylene-5H-benzo[a]phenoxazine and its vacuum-deposited thin films as well as its modified thin films (phase and chemical compositions, film microstructure) have been studied. Changes in the vapour phase content of the phenoxazone-5 derivative have been investigated as a function of the boat evaporator temperature. The chemical structures of the transformation products have been established. Thin films of 3-methacryloyloxy-9-diethylamino-5-dicyanomethylene-5H-benzo[a]-phenoxazine show good light-sensitive and masking properties and are suitable for submicron patterning under UV exposure at λ = 266 nm.
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