Pulsed laser deposition of pyroelectric pclt thin films using a ceramic/metal target

In this paper, we report the preparation and characteristics of Ca and La doped PbTiO3 (PCLT) thin film on Pt/Ti/SiO2/Si substrate by laser ablating a ceramic/metal target. The deposited film is polycrystalline and exhibits good ferroelectric hysteresis loop, low leakage, and good pyroelectric properties. The pyroelectric coefficient of the film is high as 8.81 × 10×8 C/cm2K and the effective dielectric constant of the film is about 352. So the figure of merit of the film is high as 0.78 × 10×10Ccm/J, indicating that PCLT is a promising material for pyroelectric application.