通量
丝状化
材料科学
皮秒
烧蚀
激光器
等离子体
光学
激光烧蚀
硅
纳秒
光电子学
物理
量子力学
工程类
航空航天工程
作者
Н. А. Смирнов,S. I. Kudryashov,A. A. Rudenko,D. A. Zayarny,А. А. Ионин
标识
DOI:10.1016/j.apsusc.2021.150243
摘要
Comparative single-shot pulse study of ablation topographies and depths on Si surfaces excited by 1030-nm sub- (0.3 ps) and pico-picosecond (10 ps) laser pulses at different laser fluences in air and water environments was performed. Fast energy transport via 3D-diffusion of dense electron-hole plasma was revealed at picosecond timescale to extend transversely the ablation craters over the focal spot in air for laser pulse widths shorter, than electron–phonon thermalization time about 3 ps. In the given fluence range fluence-independent shallow ablation was observed in air for 10-ps pulses. Then, rather shallow laser ablation occurred in water at supercritical peak pulse powers, apparently, due to laser beam deterioration by self-focusing and filamentation. Finally, very intense, fluence-dependent material removal took place during wet ablation by 10-ps laser pulses at the sub-critical peak pulse powers. Electron-hole plasma and related energy transport on Si surface, 1030-nm laser pulse filamentation in water, pulsewidth and ambient medium effects were revealed during the surface ablation studies.
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