A stick-slip linear piezoelectric actuator with mode conversion flexible hinge driven by symmetrical waveform

Abstract This paper presents a stick-slip linear piezoelectric actuator with mode conversion flexible hinge driven by symmetrical waveform. The mode conversion flexible hinge with a structure of chutes will make driving foot achieve lateral motion and make slider move steady. The chutes with different angles are analyzed by finite element method and the influence on the properties of the actuator is researched. The optimal angle can be found and a prototype is manufactured as well. In addition, an experimental system is established as well as a series of experiments. The output characteristic of the actuator is researched with different locking forces. The testing results indicate that the actuator can reach the maximum velocity of 18.84 mm s −1 and the maximum load can reach 360 g driven by the symmetrical waveform when the voltage is 100 V p-p and frequency is 415 Hz. Moreover, the resolution of the actuator can achieve 50 nm under the locking force of 3 N when the voltage is 43 Vp-p and frequency is 415 Hz.