Preparation and properties of all-solid-state inorganic thin film glass/ITO/WO3/LiNbO3/NiOx/ITO electrochromic device

The all-thin-film inorganic electrochromic device (ECD) with LiNbO3 as the ion conductor layer was prepared. The ECD was fabricated monolithically in a same vacuum chamber layer by layer using DC reactive sputtering for WO3, NiOx and ITO, and radio frequency (RF) sputtering for LiNbO3. The properties and performance of WO3 thin film and the ECD were studied through X-ray diffraction (XRD), scanning electron microscopy (SEM), and ultraviolet-visible spectrometry. WO3 thin film has more than 60% optical modulation with porous amorphous structure. The visible transmittance modulation of the ECD is more than 65%, and the response time of coloring and bleaching are 45 s and 25 s, respectively.