Effect of N2 gas fractions on improvement of structural, optical, and electrical properties of Cu3N thin films deposited by reactive radio frequency magnetron sputtering
薄膜
材料科学
腔磁控管
溅射
溅射沉积
无线电频率
光电子学
纳米技术
计算机科学
电信
作者
Shanta Majumder,Miho Ohishi,Katsuhiko Saito,Qixin Guo,Md Abdul Majed Patwary,Tooru Tanaka