Emergence of material-driven two-dimensional electron gas by thermodynamically robust layers in Al2O3/In2O3/Al2O3 nanolaminate structures

2D electron gas (2DEG) was formed at Al 2 O 3 (AO)/In 2 O 3 (IO) and IO/AO interfaces. Conventional reductive-precursor-driven 2DEG was generated at AO/IO, while material-driven 2DEG was developed at IO/AO, unaffected by fabrication process.