Metamaterial Gas Sensing Platform Based on Surface-Enhanced Infrared Absorption

This paper presents a miniaturized gas sensing platform for rapid and ultrasensitive optical detection of methane gas by integrating the state-of-the-art complementary metal-oxide-semiconductor compatible meta material absorber with a smart, porous metal organic framework (MOF). The implementation of methane gas detection relies on the integration between meta materials and MOF, where MOF functions as a gas trap to capture more gas into the meta material absorber. We have experimentally demonstrated an approximately 1,000-fold sensitivity enhancement by using this method. Furthermore, the investigation of the geometry-dependent characteristics provides a way to further expand the scope of application, such as CO 2 , CO and SO 2 , etc.