Miniature bimorph deformable mirror for laser beam shaping

Laser beam shaping technology nowadays requires as small diameter of the adaptive optics as possible. In our lab we usually control for laser radiation by means of bimorph deformable mirrors with a typical size of more than 50 mm. To fit the most of industrial and scientific applications the aperture of the corrector should be reduced because the use of extra optics instead makes the whole optical scheme more complicated and introduces extra distortions. But in a bid to reduce the size of the mirror we should care of the response of the mirror electrodes which obviously should not decrease drastically. Here we present 20 mm bimorph mirror with high density of electrodes which is manufactured using laser engraving technology to divide the electrode on the piezoceramic disc into a large number of the controlled sectors. The ability of laser beam formation by means of this mirror is discussed, the results are compared with the ones obtained using 50 mm bimorph deformable mirror.