光刻胶
高分子化学
材料科学
聚合物
表面改性
乙二醇
硫化物
苯乙烯
光致聚合物
预聚物
化学工程
高分子科学
化学
复合材料
共聚物
聚合
聚氨酯
有机化学
图层(电子)
冶金
工程类
作者
Mitsuhiro Hirata,Yutaka Abe,Bungo Ochiai,Takeshi Endo
摘要
Abstract Various star‐shaped poly(phenoxy propylene sulfide)s (PPSs) bearing curable end groups were synthesized by the functionalization of the propagating ends of star‐shaped poly(PPS) with various electrophilies. The functionalization with chloromethyl styrene proceeded quantitatively, and afforded polymers with M n almost agreed with theoretical value and narrow M w / M n . The photocuring conditions were optimized, and the addition of 10 wt % of poly(ethylene glycol) diacrylate was effective to attain sufficient crosslinking. The photocuring reaction of the end‐functionalized poly(PPS) films cast on silicon wafers was conducted by UV irradiation. The cured poly (PPS)s became insoluble in THF, supporting the sufficient crosslinking. Developing of a cured polymer yielded a negative photoresist pattern. © 2010 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem, 2010
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