极紫外光刻
极端紫外线
等离子体
激光器
原子物理学
产量(工程)
紫外线
材料科学
离子
能量转换效率
电子
光学
化学
物理
光电子学
核物理学
有机化学
冶金
作者
Kensuke Yoshida,Shinsuke Fujioka,Takeshi Higashiguchi,Teruyuki Ugomori,Nozomi Tanaka,Hayato Ohashi,Masato Kawasaki,Yuhei Suzuki,C. Suzuki,Kentaro Tomita,Ryoichi Hirose,Takeo Ejima,Masaharu Nishikino,Atsushi Sunahara,Enda Scally,Bowen Li,Tatsuya Yanagida,Hiroaki Nishimura,H. Azechi,G. O’Sullivan
标识
DOI:10.7567/apex.7.086202
摘要
We demonstrate high conversion efficiency for extreme ultraviolet (EUV) emission at 6.5-6.7 nm from multiple laser beam-produced one-dimensional spherical plasmas. Multiply charged-state ions produce strong resonance emission lines, which combine to yield intense unresolved transition arrays (UTAs) in Gd, Tb, and Mo. At an optimum laser intensity of 1 x 10(12)W/cm(2), which is estimated to yield an electron temperature of around 100 eV, the maximum in-band EUV conversion efficiency (CE) was observed to be 0.8%, which is one of the highest values ever reported due to the reduction of plasma expansion loss. (C) 2014 The Japan Society of Applied Physics
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