The effects of ethanol on the thickness of compound layer in plasma N-C-O multi-element penetrating process with air and ethanol were studied by scanning electron microscope(SEM).At the same time,the microstructure,surface hardness and phase composition of the layer were analyzed by scanning electron microscope(SEM),microhardness tester,and X-ray diffractometer(XRD).The experimental results show that in plasma N-C-O multi-element penetrating process,the thickness of the compound layer and microhardness of the supper layer exhibit a maximum with the increment of ratio of ethanol to air,more carbon in atmosphere decrease the compound layer thickness.