STUDY OF TiN COATINGS ON CARBIDE ALLOY BY DC-PCVD

Titanium nitride (TiN) coatings have been prepared on cemented carbides in DC-PCVD equipment made by ourselves. The micro-structure, composition, crosssection and hardness of the TiN coatings, as well as the influence of process parameters on them,have been studied. It is found that at the temperature from 500℃ to 700℃, the deposited TiN coating is single phase compact TiN with a hardness of Hv 21 560N/mm2 ;under a batch of 500 bit tools, the properties of TiN coatings deposited on different bits are uniform. It makes the PCVD technique possible for batch production.