Highly Reliable Diamond MEMS Dual Sensor for Magnetic Fields and Temperatures with Self‐Recognition Algorithms

Abstract Nearly all sensors inevitably suffer from environmental influence such as temperature fluctuation. To precisely process the external signals, independent temperature compensation devices or electronic circuits are usually required, making the overall system and algorithms sophisticated. Especially, when the environment temperature is as high as over 200 °C, both the sensors and temperature‐compensation devices encounter the reliability problem. In this work, an intelligent multifunctional sensor utilizing single‐crystal diamond (SCD) microelectromechanical (MEMS) resonators is demonstrated that can sense both magnetic fields and temperatures up to 300 °C, independently. The strategy is to integrate a magnetostrictive thin film and a non‐magnetic thin film on different diamond MEMS resonators on the same diamond chip for simultaneous magnetic field sensing and temperature monitoring, respectively. The multi‐resonators based on diamond MEMS offer a promising platform for multi‐parameter sensing immune to environment interference.