Electroplating of Micropatterned Nickel Phase Gratings for X-ray Phase Contrast Tomography

We report on a new approach of monitoring Nickel-Sulfamate based electroplating baths to obtain a more precise control of the height of x-ray phase contrast gratings. The influence of the Ti/TiOx film substrates on electroplating start and behavior is investigated. A four phase electroplating sequence was recorded and utilized to adaptively control the height of electroplated samples.