纳米光刻
激光器
光学
投影(关系代数)
材料科学
激光束
领域(数学)
曲面(拓扑)
光电子学
纳米技术
物理
制作
计算机科学
几何学
医学
病理
数学
纯数学
替代医学
算法
作者
Wei Guo,Z. B. Wang,L. Li,David Whitehead,Boris Luk‘yanchuk,Z. Liu
摘要
The authors present a simple and efficient technique for laser writing of arbitrary nanopatterns across a large surface area without using projection masks. It is based on the unique near-field focusing effect of a self-assembled particle array on the surface interacting with an angular incident laser beam. The spot resolution can be down to 80nm. More than 6×106 nanolines and c-shaped uniform patterns were fabricated simultaneously over an area of 5×5mm2 by a few laser shots.
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