Analysis of Irradiation Processes for Laser-Induced Periodic Surface Structures

The influence of errors on the irradiation process for laser-induced periodic surface structures (LIPSS) was studied theoretically with energy density simulations. Therefore an irradiation model has been extended by a selection of technical variations. The influence of errors has been found in a deviation from optimal conditions, by a shift or spread of accumulated fluence and a variation of local fluence, related to variations of the peak fluence and relative pulse intersection. The analysis of the irradiation process by energy density simulations, gives the possibility to perform realistic irradiation simulations and derive optimization strategies for the determination of irradiation parameters. This analysis is required for the application of LIPSS for surface functionalization.