光学
干涉光刻
平版印刷术
光子学
干扰(通信)
光刻
极化(电化学)
材料科学
无光罩微影
下一代光刻
电子束光刻
纳米-
X射线光刻
光子晶体
光电子学
物理
纳米技术
制作
抵抗
电信
计算机科学
复合材料
物理化学
化学
病理
医学
频道(广播)
替代医学
图层(电子)
作者
Jianfang He,Xiaohui Fang,Yuanhai Lin,Xinping Zhang
出处
期刊:Optics Express
[Optica Publishing Group]
日期:2015-04-23
卷期号:23 (9): 11518-11518
被引量:12
摘要
Half-wave plates were introduced into an interference-lithography scheme consisting of three fibers that were arranged into a rectangular triangle. Such a flexible and compact geometry allows convenient tuning of the polarizations of both the UV laser source and each branch arm. This not only enables optimization of the contrast of the produced photonic structures with expected square lattices, but also multiplies the nano-patterning functions of a fixed design of fiber-based interference lithography. The patterns of the photonic structures can be thus tuned simply by rotating a half-wave plate.
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