Consideration of Figure of Merit of Piezoelectric Vibratory Gyroscope Using Charge Sensitivity

In this paper, charge sensitivity has been considered as a figure of merit of piezoelectric vibratory gyroscope. First, an approximate equation for charge sensitivity is derived based on an equivalent circuit of the gyroscope. Second, the charge sensitivity characteristics have been discussed in terms of the effects of frequency deviation and load capacitance. The difference between charge sensitivity and voltage sensitivity is quantitatively clarified. Charge sensitivity is effective as a figure of merit for applying a piezoelectric single crystal to the gyroscope.